COMPUTER ALGORITHM FOR ACCURATE AND REPEATABLE PROFILE ANALYSIS USING ANODIZATION AND STRIPPING OF SILICON - STONE, JL; PLUNKETT, JC; LEU, A (TEXAS A&M UNIV,DEPT ELECT ENGN,INST SOLID STATE ELECTR,COLLEGE STN,TX 77843, 1949)
SOLID STATE ELECTRON
Keywords: COMPUTER ALGORITHM, ACCURATE, REPEATABLE PROFILE, ANALYSIS, ANODIZATION, STRIPPING, SILICON; CIENCIAS TECNOLOGICAS; TECNOLOGIA ELECTRONICA